Lead-free piezoelectric ceramic films and a method for making thereof
Overview
This invention relates to lead-free piezoelectric ceramic films and a method of making thereof. Specifically, the invention is directed to a method for fabricating lead-free piezoelectric free standing films having enhanced piezoelectric properties. The films may be used for a number of applications including incorporation in microelectronic devices such as energy harvesting devices and sensor technologies.
Intellectual Property and Development Status
United States Issued Patent- 8,241,569
United States Issued Patent- 8,496,870
United States Issued Patent- 8,715,575
Commercialization Opportunities